Silicon Pressure Sensors

Silicon pressure sensors have silicon based sensing diaphragms which have a very high elasticity and semiconductor strain gauges implanted in the silicon substrate which produce a high span sensitivity.

Silicon pressure transducers have a high mV/V output signal, high overpressure and very good non-linearity, hysteresis and repeatability measurement precision.

Pressure transducers & transmitters with silicon strain gauge sensing diaphragms which have output signals with good linearity, hysteresis and short term repeatability. Semiconductor pressure sensors also have high overpressure ratings and sensitivity due to the high gauge factors of the semiconductor strain gauges.

Pressure sensors that utilise silicon sensing elements offer many advantages over other pressure sensing technologies, they are small, lightweight, highly repeatable, stable over time, dynamically responsive and very sensitive to variations in pressure.

The base diaphragm material is typically ‘n’ type mono-crystalline layer Silicon which is 100 % elastic to its breaking point and therefore is a perfect material for use as a sensing diaphragm.